Through Silicon Capacitor co-integrated with TSVs on silicon interposer - ScienceDirect
Fabrication process of the proposed trench capacitor | Download Scientific Diagram
Massive On-Die Capacitor for Integrated Circuits
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Deep Trench Capacitor (DTC) - WikiChip
Ferroelectric deep trench capacitors based on Al:HfO2 for 3D nonvolatile memory applications | Semantic Scholar
19.5 Integrated Deep Trench Capacitor in Si Interposer for CoWoS Heterogeneous Integration
BALD Engineering - Born in Finland, Born to ALD: Ferroelectric deep trench capacitors based on Al:HfO2 for 3D nonvolatile memory applications
US20140145299A1 - Deep trench structure for high density capacitor - Google Patents
Infineon Achieves Breakthrough in DRAM Trench Technology - Demonstrates Scalability to Process Structures of 70 Nanometer - Infineon Technologies
Chipworks Real Chips: December 2012
High-Density 3-D Capacitors for Power Systems On-Chip: Evaluation of a Technology Based on Silicon Submicrometer Pore Arrays For
SEM images of the trench capacitors: (a) crosssection view and (b)... | Download Scientific Diagram
19.5 Integrated Deep Trench Capacitor in Si Interposer for CoWoS Heterogeneous Integration
Integrated Deep Trench Capacitor in Si Interposer for CoWoS Heterogeneous Integration | Semantic Scholar
TSMC Digs Trenches In Search Of Higher Performance – WikiChip Fuse
Silicon Capacitors with extremely high stability and reliability ideal for high temperature applications
Micromachines | Free Full-Text | High-Performance MIM Capacitors for a Secondary Power Supply Application
IEDM 2019 (Part 2) 3D_Packaging Innovation and Memory Technology (Ferroelectrics) – The Media News
Proceedings | Free Full-Text | Analysis of pn Junction Deep Trench Isolation with SU-8/SiO2-Liner Passivation in a Linear Butt-Coupled 3D CMOS Si Photodetector Array
Schematic of trench capacitors built into the ion trap chip Si substrate. | Download Scientific Diagram
memory - Calculation of capacitor of deep trench DRAM - Electrical Engineering Stack Exchange
